MPX4100 데이터 시트보기 (PDF) - Freescale Semiconductor

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MPX4100

SILICON PRESSURE SENSOR

Freescale Semiconductor 

The MPX4100 series piezoresistive transducer is a state-

of-the-art, monolithic, signal conditioned, silicon pressure

sensor. This sensor combines advanced micromachining

techniques, thin film metallization, and bipolar semiconductor

processing to provide an accurate, high level analog output

signal that is proportional to applied pressure.

Figure 1 shows a block diagram of the internal circuitry

integrated on a pressure sensor chip.

VS

Sensing

Element

Thin Film

Gain Stage #2

Temperature

and

Compensation

Ground

VOUT

and

Reference

Gain Stage #1

Shift Circuitry

Pins 4, 5, and 6 are NO CONNECTS

GND

Figure 1. Fully Integrated Pressure Sensor Schematic

Table 1. MAXIMUM RATINGS(1)

Rating

Symbol

Overpressure(2) (P1 > P2)

Burst Pressure(2) (P1 > P2)

Pmax

Pburst

Storage Temperature

Tstg

Operating Temperature

TA

1. TC = 25°C unless otherwise noted.

2. Exposure beyond the specified limits may cause permanent damage or degradation to the device.

Value

400

1000

-40 to +125

-40 to +125

Unit

kPa

kPa

°C

°C

MPX4100

2

Sensors

Freescale Semiconductor

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