C7460 데이터 시트보기 (PDF) - Hamamatsu Photonics

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C7460

Multiband Plasma-Process Monitor

Hamamatsu Photonics 

Plasma Process Data Acquisition Software

U9046

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SOFTWARE ARCHITECTURE

Drivers

Watchdog

Logging

Communication Layer

Database

Control Station

OUTLINE

The U9046 is a software which allows to control up to 4 units

of C7460 multiband plasma process monitor simultaneously

and observe the spectrum of plasma emission during plasma

processes. The observed spectrum data are stored in the

database automatically and can be analyzed. The highly

sensitive end-point detection software U8851 is an option. And

also the fault detection software for Advanced Process Control

will be available.

FEATURES

q Up to 4 units of C7460 can be controlled simultaneously,

and all of the spectrum data during plasma process can be

observed.

q Database oriented data storage is available and a fast SQL

based data access is allowed.

q The various ways to trigger the measurement are prepared.

q The drivers to communicate to the plasma chambers or

factory network can be optionally provided.

MPM C7460

U9046 consists of several software components to perform the

measurement in real time with great flexibility.

q Control Station

Control Station allows to control C7460s and observe the

spectrum data. The measurement can be triggered by the trigger

signal from the plasma chamber and also by the optical trigger.

The measurement can be repeated automatically during the

several wafers' process.

q Database

The spectrum data observed by the Control Station are stored into

the SQL compatible Database.

q Watchdog

The Watchdog software component always monitors the condition

of the software, and an error will be reported by an e-mail.

q Logging

The Logging component records the history of the software jobs in

a file.

q Drivers for the Plasma Chambers

The Drivers software can be provided to make communication to

the plasma chambers or factory network. The Drivers can obtain

the information about the process like Process ID and Lot No. and

so on. Such information can be stored with the observed spectrum

data into the Database. Such a driver is needed typically for

endpoint and automatic fault detection installations.

q Easy Graphical User Interfaces

The graphical user interfaces (GUIs) used by the process

engineer and by the operators are different and dedicated to their

respective tasks. Specifically, the operators' GUI is very easy to

use, minimizing the risk of human errors.

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