MPXL10GC7U 데이터 시트보기 (PDF) - Motorola => Freescale

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MPXL10GC7U

10 kPa Uncompensated Silicon Pressure Sensor

Motorola => Freescale 

TEMPERATURE COMPENSATION

Figure 2 shows the typical output characteristics of the

MPXL10 series over temperature.

The X–ducer piezoresistive pressure sensor element is a

semiconductor device which gives an electrical output signal

proportional to the pressure applied to the device. This de-

vice uses a unique transverse voltage diffused semiconduc-

tor strain gauge which is sensitive to stresses produced in a

thin silicon diaphragm by the applied pressure.

Because this strain gauge is an integral part of the silicon

diaphragm, there are no temperature effects due to differ-

ences in the thermal expansion of the strain gauge and the

diaphragm, as are often encountered in bonded strain gauge

pressure sensors. However, the properties of the strain

gauge itself are temperature dependent, requiring that the

device be temperature compensated if it is to be used over

an extensive temperature range.

Temperature compensation and offset calibration can be

MPXL10 SERIES

achieved rather simply with additional resistive components,

or by designing your system using the MPX2010D series

sensor.

LINEARITY

Linearity refers to how well a transducer’s output follows

the equation: Vout = Voff + sensitivity x P over the operating

pressure range (Figure 3). There are two basic methods for

calculating nonlinearity: (1) end point straight line fit or (2) a

least squares best line fit. While a least squares fit gives the

“best case” linearity error (lower numerical value), the cal-

culations required are burdensome.

Conversely, an end point fit will give the “worst case” error

(often more desirable in error budget calculations) and the

calculations are more straightforward for the user. Motorola’s

specified pressure sensor linearities are based on the end

point straight line method measured at the midrange

pressure.

80

70

60

VS = 3 Vdc

P1 > P2

50

40

30

+ 25°C

– 40°C

+ 125°C

SPAN

RANGE

(TYP)

20

10

0

PSI 0

kPa

0.3

0.6

0.9

1.2

2.0

4.0

6.0

8.0

PRESSURE DIFFERENTIAL

OFFSET

(TYP)

1.5

10

Figure 2. Output versus Pressure Differential

70

60

LINEARITY

50

ACTUAL

40

30

20

THEORETICAL

SPAN

(VFSS)

10

OFFSET

0

(VOFF)

0

MAX POP

PRESSURE (kPA)

Figure 3. Linearity Specification Comparison

Figure 4 illustrates the Differential/Gauge Sensing Chip in

the basic Low Profile Package (Case 472B–01). A fluorosili-

cone gel isolates the die surface and wire bonds from the envi-

ronment, while allowing the pressure signal to be transmitted

to the sensor diaphragm.

The MPXL10 series pressure sensor operating characteris-

tics, and internal reliability and qualification tests are based on

use of dry air as the pressure media. Media, other than dry air,

may have adverse effects on sensor performance and long–

term reliability. Contact the factory for information regarding

media compatibility in your application.

STAINLESS STEEL

MWETIRAELDBCIEOONVDEÉÉÉÉÉÉÉRS ÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÉÇÇÉÉÉÉÉÉÉÇÇÉÉÉÉÉÉÉP1ÇÇÉÉÉÉÉÉÉÇÇÉÉÉÉÉÉÉÉÉÉÉÉÉÉFLÉÉÉÉÉÉÉUODRIÉÉÉÉÉÉÉEOCSOILAICTONE

EPOXY CASE

LEAD FRAME

Figure 4. Cross–Sectional Diagram

(Not to Scale)

Motorola Sensor Device Data

3

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