MPX5010GSX 데이터 시트보기 (PDF) - Motorola => Freescale

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MPX5010GSX

INTEGRATED PRESSURE SENSOR 0 to 10 kPa (0 to 1.45 psi) 0.2 to 4.7 V OUTPUT

Motorola => Freescale 

MOTOROLA

SEMICONDUCTOR TECHNICAL DATA

Order this document

by MPX5010/D

Integrated Silicon Pressure Sensor

On-Chip Signal Conditioned,

Temperature Compensated

and Calibrated

The MPX5010 series piezoresistive transducer is a state–of–the–art monolithic silicon

pressure sensor designed for a wide range of applications, but particularly those

employing a microcontroller or microprocessor with A/D inputs. This patented, single

element transducer combines advanced micromachining techniques, thin–film metalliza-

tion, and bipolar processing to provide an accurate, high level analog output signal that

is proportional to the applied pressure.

Features

• 5.0% Maximum Error over 0° to 85°C

• Ideally Suited for Microprocessor or Microcontroller–Based Systems

• Patented Silicon Shear Stress Strain Gauge

• Durable Epoxy Unibody Element

* • Temperature Compensated over 40° to +125°C

VS

3

MPX5010

SERIES

INTEGRATED

PRESSURE SENSOR

0 to 10 kPa (0 to 1.45 psi)

0.2 to 4.7 V OUTPUT

BASIC CHIP

CARRIER ELEMENT

CASE 867–08, STYLE 1

X–ducer

SENSING

ELEMENT

THIN FILM

TEMPERATURE

COMPENSATION

AND

GAIN STAGE #1

GAIN STAGE #2

AND

GROUND

REFERENCE

SHIFT CIRCUITRY

1

Vout

2

PINS 4, 5 AND 6 ARE NO CONNECTS

GND

Figure 1. Fully Integrated Pressure Sensor Schematic

MAXIMUM RATINGS(1)

Parametrics

Symbol

Value

Unit

Overpressure(2) (P1 > P2)

Burst Pressure(2) (P1 > P2)

Pmax

Pburst

75

kPa

100

kPa

Storage Temperature

Tstg

– 40 to +125

°C

Operating Temperature

TA

– 40 to +125

°C

1. TC = 25°C unless otherwise noted.

2. Exposure beyond the specified limits may cause permanent damage or degradation to the device.

DIFFERENTIAL

PORT OPTION

CASE 867C–05, STYLE 1

PIN NUMBER

1

Vout

4

N/C

2

Gnd

5

N/C

3

VS

6

N/C

NOTE: Pins 4, 5, and 6 are internal

device connections. Do not connect

to external circuitry or ground. Pin 1

is noted by the notch in the Lead.

Senseon and X–ducer are trademarks of Motorola, Inc.

REV 2

© MMotootroolrao, lIanc.S1e9n97sor Device Data

1

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